DocumentCode
2637938
Title
Oxide-confined high index contrast ridge waveguide curved resonator laser diodes
Author
Liang, Di ; Wang, Jusong ; Hall, Douglas C.
Author_Institution
Dept. of Electr. Eng., Notre Dame Univ., IN, USA
fYear
2005
fDate
22-28 Oct. 2005
Firstpage
943
Lastpage
944
Abstract
A simple, novel self-aligned deeply-etched plus wet thermally oxidized ridge waveguide fabrication process is demonstrated which enables high-index-contrast, low loss curved resonator GRINSCH lasers with a bend radius as low as 10 μm.
Keywords
etching; laser cavity resonators; optical losses; semiconductor lasers; waveguide lasers; GRINSCH lasers; curved resonator laser diodes; deep etching; high index contrast laser diodes; low loss curved resonator; oxide-confined laser diodes; ridge waveguide fabrication; ridge waveguide laser diodes; self-aligned fabrication; wet thermal oxidation; Diode lasers; Geometrical optics; Laser modes; Optical pulses; Optical resonators; Optical scattering; Optical waveguides; Oxidation; Semiconductor lasers; Waveguide lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society, 2005. LEOS 2005. The 18th Annual Meeting of the IEEE
Print_ISBN
0-7803-9217-5
Type
conf
DOI
10.1109/LEOS.2005.1548322
Filename
1548322
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