A MEMS-EDA-methodology Based On Process Management

Author

Brück, R. ; Hahn, K. ; Popp, J. ; Schmidt, T. ; Wagener, A. ; Wahl, M.

Author_Institution

Siegen Univ.

fYear

2006

fDate

22-24 June 2006

Firstpage

198

Lastpage

201

Abstract

Today\´s MEMS-design is frequently supported by EDA-frameworks made for micro electronic circuits or derived from microelectronics frameworks. These frameworks usually do not completely meet the requirements of MEMS design. This is due to the fact that they are optimized to manage huge amounts of devices from a very limited set of device types (management of complexity). However, because of the inherently 3-dimensional-nature of MEMS products, MEMS design requires the application specific forming of the fabrication process to be used (management of technology). This paper first introduces the methodology of "management of technology" and then uses the example of the PROMENADE-framework to demonstrate how this methodology can be utilized to increase MEMS-design productivity

Keywords

electronic design automation; micromechanical devices; technology management; MEMS EDA methodology; MEMS design; PROMENADE framework; process management; technology management; Design automation; Design methodology; Electronic circuits; Electronic design automation and methodology; Fabrication; Microelectronics; Micromechanical devices; Process design; Product design; Registers;

fLanguage

English

Publisher

ieee

Conference_Titel

Mixed Design of Integrated Circuits and System, 2006. MIXDES 2006. Proceedings of the International Conference

Conference_Location

Gdynia

Print_ISBN

83-922632-2-7

Type

conf

DOI

10.1109/MIXDES.2006.1706567

Filename

1706567