Title :
High-resolution metrology of high-finesse filters
Author :
Farrant, D.I. ; Arkwright, J.W. ; Fairman, P.S.
Author_Institution :
CSIRO Ind. Phys., Lindfield, NSW
Abstract :
The resolution of an angle-scanning technique for measuring Fabry-Perot etalons is analysed and it is shown that sub-nanometre resolution can be readily achieved in the measurement of optical thickness variations
Keywords :
Fabry-Perot interferometers; optical filters; optical variables measurement; Fabry-Perot etalons; angle-scanning technique; high-finesse filters; high-resolution metrology; optical thickness variations; subnanometre resolution; Apertures; Fabry-Perot; Lithium niobate; Metrology; Optical filters; Optical imaging; Optical refraction; Optical variables control; Reflectivity; Thickness measurement;
Conference_Titel :
Lasers and Electro-Optics Society, 2005. LEOS 2005. The 18th Annual Meeting of the IEEE
Conference_Location :
Sydney, NSW
Print_ISBN :
0-7803-9217-5
DOI :
10.1109/LEOS.2005.1548328
