Title :
Electron Beam Assisted MOCVD For Quantum Wires And Boxes
Author :
Arakawa, Yasuhiko
Author_Institution :
University Of Tokyo
fDate :
29 Jul-2 Aug 1991
Keywords :
Electron beams; Fabrication; Gallium arsenide; Ion beams; MOCVD; Microstructure; Substrates; Surface cracks; Wet etching; Wires;
Conference_Titel :
Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on
Print_ISBN :
0-87942-618-7
DOI :
10.1109/LEOSST.1991.638916
