DocumentCode
2639298
Title
Electron Beam Assisted MOCVD For Quantum Wires And Boxes
Author
Arakawa, Yasuhiko
Author_Institution
University Of Tokyo
fYear
1991
fDate
29 Jul-2 Aug 1991
Firstpage
7
Lastpage
8
Keywords
Electron beams; Fabrication; Gallium arsenide; Ion beams; MOCVD; Microstructure; Substrates; Surface cracks; Wet etching; Wires;
fLanguage
English
Publisher
ieee
Conference_Titel
Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on
Print_ISBN
0-87942-618-7
Type
conf
DOI
10.1109/LEOSST.1991.638916
Filename
638916
Link To Document