A low power, polyimide valved micropump for precision drug delivery

We present a microfabricated pump designed for low flow-rate, implantable drug infusion. The positive displacement type micropump is actuated by a precision linear stepper fabricated using watch-making technology and incorporates two polyimide check-valves which were fabricated using photolithography. Two check-valve die are juxtaposed, bonded and subsequently packaged using PDMS bonding techniques. The design was implemented in order to meet the three major challenges that still face implantable micropumps; low power actuation, debris tolerant valves, and packaging.