• DocumentCode
    2640763
  • Title

    Digital-like Monolayer Epitaxy Of GalnAs On

  • Author

    Kawanishi, H. ; Ikeda, H.

  • Author_Institution
    Kogakuin university, Tokyo, Japan
  • fYear
    1991
  • fDate
    29 Jul-2 Aug 1991
  • Firstpage
    20
  • Lastpage
    20
  • Keywords
    Atomic beams; Atomic layer deposition; Epitaxial growth; Epitaxial layers; Indium phosphide; Lattices; Molecular beam epitaxial growth; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on
  • Print_ISBN
    0-87942-618-7
  • Type

    conf

  • DOI
    10.1109/LEOSST.1991.638923
  • Filename
    638923