Title :
Digital-like Monolayer Epitaxy Of GalnAs On
Author :
Kawanishi, H. ; Ikeda, H.
Author_Institution :
Kogakuin university, Tokyo, Japan
fDate :
29 Jul-2 Aug 1991
Keywords :
Atomic beams; Atomic layer deposition; Epitaxial growth; Epitaxial layers; Indium phosphide; Lattices; Molecular beam epitaxial growth; Substrates;
Conference_Titel :
Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on
Print_ISBN :
0-87942-618-7
DOI :
10.1109/LEOSST.1991.638923
