DocumentCode
2640763
Title
Digital-like Monolayer Epitaxy Of GalnAs On
Author
Kawanishi, H. ; Ikeda, H.
Author_Institution
Kogakuin university, Tokyo, Japan
fYear
1991
fDate
29 Jul-2 Aug 1991
Firstpage
20
Lastpage
20
Keywords
Atomic beams; Atomic layer deposition; Epitaxial growth; Epitaxial layers; Indium phosphide; Lattices; Molecular beam epitaxial growth; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on
Print_ISBN
0-87942-618-7
Type
conf
DOI
10.1109/LEOSST.1991.638923
Filename
638923
Link To Document