Fluidic actuator array for parallel cooperative MEMS

A microactuator array for the convergence system as an example of parallel cooperative micro electromechanical systems (MEMS) is described. Research is based on the concept of distributed micro motion systems (DMMS) fabricated by micromachining process. A fluidic microactuator which has nozzles with valves is designed, and an array of these microactuators is fabricated on an SOI (Silicon On Insulator) substrate. The dimensions of each actuator are about 100 μm × 200 μm. Each microactuator can control the direction of air flow by electrostatically closing a nozzle to convey objects in the desired direction. The experiment to convey objects to the desired position by the one-dimensional conveyance system is performed successfully