Application of Design of Computer Experiments (DoCE) method for the extraction of the elasto-plastic behavior law of ECD copper through nano-indentation tests

Author

Moreau, Stephane ; de Crecy, Francois ; Mandrillon, Vincent

Author_Institution

Univ. Grenoble Alpes, Grenoble, France

fYear

2015

fDate

19-22 April 2015

Firstpage

1

Lastpage

6

Abstract

This paper report a new methodology combining finite element modeling (FEM) and nanoindentation tests in order to extract the plasticity law of ECD copper film. Thanks to this approach, we demonstrate that simple plasticity law (ANSYS Multilinear ISOtropic hardening (MISO) [1]) reaches the goal of fitting instead of more complex ones (Hollomon-like models [2]). In addition, there is no unique solution but a set of good solutions!

Keywords

design of experiments; elastoplasticity; electrodeposition; finite element analysis; nanoindentation; ANSYS multilinear isotropic hardening; DoCE method; ECD copper film; FEM; MISO; design of computer experiments method; elasto-plastic behavior law; finite element modeling; nanoindentation tests; plasticity law; Atmospheric measurements; Curve fitting; Displacement measurement; Erbium; Lead; Particle measurements; Reliability;

fLanguage

English

Publisher

ieee

Conference_Titel

Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2015 16th International Conference on

Conference_Location

Budapest

Print_ISBN

978-1-4799-9949-1

Type

conf

DOI

10.1109/EuroSimE.2015.7103084

Filename

7103084