CNT based X-ray source for inspection system

Carbon nanotubes (i.e., CNTs) are tubular carbon molecules with properties that make them potentially useful in extremely small scale electronic and mechanical applications. Because of this, CNTs are widely used in many parts such as, field emission display (FED), nanoscale sensors, vacuum electronic devices, and so on. In this study, CNTs were applied for an X-ray emitter. CNTs were grown on the metal substrate by thermal CVD method and the length of the grown CNTs was about 30~50 um. The electrical properties of the grown CNT emitter were tested in an X-ray tube, which has triode structure (i.e., a cathode as CNT emitter, a grid, and an anode). Electron beam focusing characteristics were also studied by using the Opera 3D code, therefore, positions of individual electrodes in the triode were optimized for the best X-ray generation. Typical X-ray images were obtained in this study and the detailed descriptions of the manufactured X-ray triode were discussed.