Stacked-spiral RF inductors with fully-filled vertical nanoparticle magnetic core

Author

Zhan, Jing ; Wang, Xin ; Fang, Qiang ; Shi, Zitao ; Yang, Yi ; Ren, Tian-Ling ; Wang, Albert ; Cheng, Yuhua ; Li, Xinxin ; Yang, Chen

Author_Institution

Tsinghua Univ., Beijing, China

fYear

2012

fDate

17-19 June 2012

Firstpage

367

Lastpage

370

Abstract

A new concept of stacked-spiral inductor fully-filled with VERTICAL closed-circuit nano-particle magnetic core in CMOS is reported. Prototypes, fabricated in a six Al metal layer CMOS backend process using ferrite nanoparticles, show a high inductance-density up to 920 nH/mm² in multi-GHz, which is promising for making super compact inductors in RF system-on-a-chip (SoC).

Keywords

CMOS digital integrated circuits; aluminium; inductors; magnetic cores; nanoparticles; radiofrequency integrated circuits; system-on-chip; RF SoC; RF system-on-a-chip; aluminium metal layer CMOS backend process; compact inductors; ferrite nanoparticle; fully-filled vertical closed-circuit nanoparticle magnetic core; inductance density; stacked-spiral RF inductors; stacked-spiral inductor; CMOS integrated circuits; Inductors; Magnetic cores; Magnetic flux; Magnetic resonance; Radio frequency; Spirals; Inductors; magnetic cores; nanoparticles; radio frequency;

fLanguage

English

Publisher

ieee

Conference_Titel

Radio Frequency Integrated Circuits Symposium (RFIC), 2012 IEEE

Conference_Location

Montreal, QC

ISSN

1529-2517

Print_ISBN

978-1-4673-0413-9

Electronic_ISBN

1529-2517

Type

conf

DOI

10.1109/RFIC.2012.6242301

Filename

6242301