Title :
Stacked-spiral RF inductors with fully-filled vertical nanoparticle magnetic core
Author :
Zhan, Jing ; Wang, Xin ; Fang, Qiang ; Shi, Zitao ; Yang, Yi ; Ren, Tian-Ling ; Wang, Albert ; Cheng, Yuhua ; Li, Xinxin ; Yang, Chen
Author_Institution :
Tsinghua Univ., Beijing, China
Abstract :
A new concept of stacked-spiral inductor fully-filled with VERTICAL closed-circuit nano-particle magnetic core in CMOS is reported. Prototypes, fabricated in a six Al metal layer CMOS backend process using ferrite nanoparticles, show a high inductance-density up to 920 nH/mm2 in multi-GHz, which is promising for making super compact inductors in RF system-on-a-chip (SoC).
Keywords :
CMOS digital integrated circuits; aluminium; inductors; magnetic cores; nanoparticles; radiofrequency integrated circuits; system-on-chip; RF SoC; RF system-on-a-chip; aluminium metal layer CMOS backend process; compact inductors; ferrite nanoparticle; fully-filled vertical closed-circuit nanoparticle magnetic core; inductance density; stacked-spiral RF inductors; stacked-spiral inductor; CMOS integrated circuits; Inductors; Magnetic cores; Magnetic flux; Magnetic resonance; Radio frequency; Spirals; Inductors; magnetic cores; nanoparticles; radio frequency;
Conference_Titel :
Radio Frequency Integrated Circuits Symposium (RFIC), 2012 IEEE
Conference_Location :
Montreal, QC
Print_ISBN :
978-1-4673-0413-9
Electronic_ISBN :
1529-2517
DOI :
10.1109/RFIC.2012.6242301
