Title :
Properties of RF sputtered CdS thin films
Author :
Ashour, H. ; Akkad, F. El ; Bohari, R. ; Herrmann, K.H.
Author_Institution :
Dept. of Phys., Kuwait Univ., Safat, Kuwait
Abstract :
CdS thin films have been prepared using RF sputtering in an Ar atmosphere. X-ray diffraction studies showed that the films have hexagonal structure with crystallites preferentially oriented in the [002] direction. The crystallite size determined from the broadening of the [002] peak was found to increase with film thickness. The results of electrical conductivity measurements on films with different thickness suggest that the crystallites are undepleted above a thickness of about 500 nm and partially depleted below that value. The intergrain barrier height was determined to be in the range 0 to 0.15 eV in the studied samples. The energy band gap was determined from optical absorption data to be 2.46±0.01 eV for the studied films. From the temperature dependence of the electrical conductivity, activation energies in the range 0.12-0.21 eV were determined which agree with previously reported values.
Keywords :
II-VI semiconductors; X-ray diffraction; cadmium compounds; crystallites; electrical conductivity; energy gap; grain size; light absorption; semiconductor thin films; sputter deposition; 0 to 0.15 eV; 0.12 to 0.21 eV; 2.45 to 2.47 eV; Ar; Ar atmosphere; CdS; CdS thin film properties; CdS thin films; RF sputtered CdS thin films; RF sputtering; X-ray diffraction; activation energy; crystallite [002] peak broadening; crystallite size; crystallites; electrical conductivity; electrical conductivity measurements; energy band gap; film thickness; hexagonal structure; intergrain barrier height; optical absorption data; partially depleted crystallites; preferentially oriented [002] crystallites; temperature dependence; Argon; Atmosphere; Conductive films; Conductivity measurement; Crystallization; Optical films; Photonic band gap; Radio frequency; Sputtering; X-ray diffraction;
Conference_Titel :
Microelectronics, 1999. ICM '99. The Eleventh International Conference on
Print_ISBN :
0-7803-6643-3
DOI :
10.1109/ICM.2000.884854