Title :
Fast analytical design of Poly-SiGe MEMS pressure sensors
Author :
Rochus, V. ; Wang, B. ; Chaudhuri, A. Ray ; Helin, P. ; Severi, S. ; Rottenberg, X.
Author_Institution :
Imec, Heverlee, Belgium
Abstract :
This paper presents a fast design strategy for Poly-SiGe MEMS pressure sensors, based on circular Kirchhoff-Love plate theory. The underlying analytical model allows for a rapid and accurate evaluation of the sensitivity of the sensors, crucial for improving their design. The accuracy of the new model is demonstrated by comparing its predictions with more computationally expensive simulation techniques (high-order parametric element and three-dimensional finite element models) and with experimental measurements performed on a 300μm membrane fabricated using the Poly-SiGe platform developed at imec.
Keywords :
Ge-Si alloys; finite element analysis; membranes; microsensors; pressure sensors; SiGe; circular Kirchhoff-Love plate theory; fast design strategy; high-order parametric element; membrane; poly-SiGe MEMS pressure sensors; simulation techniques; size 300 mum; three-dimensional finite element models; Analytical models; Displacement measurement; Lead; Q measurement; Silicon compounds; Silicon germanium;
Conference_Titel :
Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2015 16th International Conference on
Conference_Location :
Budapest
Print_ISBN :
978-1-4799-9949-1
DOI :
10.1109/EuroSimE.2015.7103163
