DocumentCode :
2642833
Title :
A Simple Analysis Of An Electrodeless Inductive Low Pressure Discharge Based On External Electrical Measurements
Author :
Piejak, R.B. ; Godyak, V.A. ; Alexandrovich, B.M.
Author_Institution :
GTE Laboratories Inc.
fYear :
1993
fDate :
1-3 June 1993
Firstpage :
88
Lastpage :
88
Keywords :
Coils; Current measurement; Electric variables measurement; Electrodes; Photometry; Plasma measurements; Plasma temperature; Pressure measurement; Radio frequency; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
Conference_Location :
Tampa, FL, USA
Print_ISBN :
0-7803-0716-X
Type :
conf
DOI :
10.1109/PLASMA.1992.697762
Filename :
697762
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2642833
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