Title :
Lifetime evaluation of self-modulated MEMS infrared light source made of single crystalline silicon
Author :
Kishi, Naoki ; Hara, Hitoshi
Author_Institution :
Yokogawa Electr. Corp., Yokogawa
Abstract :
We have developed a self-modulated light source for infrared spectroscopy. The filaments of the light source that are made of single crystalline silicon can be realized by Micro-Electro-Mechanical Systems (MEMS) technology. The experimental prototypes have been fabricated and the characteristics of the devices have been measured. The lifetime of the light source has been evaluated by the resistance drift of the filaments. The operating condition at which the drift is less than 1.0%/year has been estimated and demonstrated.
Keywords :
elemental semiconductors; infrared sources; infrared spectroscopy; micromechanical devices; silicon; spectroscopic light sources; Si; filament resistance drift; infrared spectroscopy; microelectro-mechanical systems technology; self-modulated MEMS infrared light source; single crystalline silicon; Boron; Choppers; Crystallization; Etching; Infrared detectors; Infrared spectra; Light sources; Micromechanical devices; Optical filters; Silicon; MEMS; infrared light source; lifetime; self-modulation; silicon;
Conference_Titel :
SICE, 2007 Annual Conference
Conference_Location :
Takamatsu
Print_ISBN :
978-4-907764-27-2
Electronic_ISBN :
978-4-907764-27-2
DOI :
10.1109/SICE.2007.4421400
