Lifetime evaluation of self-modulated MEMS infrared light source made of single crystalline silicon

Author

Kishi, Naoki ; Hara, Hitoshi

Author_Institution

Yokogawa Electr. Corp., Yokogawa

fYear

2007

fDate

17-20 Sept. 2007

Firstpage

2451

Lastpage

2454

Abstract

We have developed a self-modulated light source for infrared spectroscopy. The filaments of the light source that are made of single crystalline silicon can be realized by Micro-Electro-Mechanical Systems (MEMS) technology. The experimental prototypes have been fabricated and the characteristics of the devices have been measured. The lifetime of the light source has been evaluated by the resistance drift of the filaments. The operating condition at which the drift is less than 1.0%/year has been estimated and demonstrated.

Keywords

elemental semiconductors; infrared sources; infrared spectroscopy; micromechanical devices; silicon; spectroscopic light sources; Si; filament resistance drift; infrared spectroscopy; microelectro-mechanical systems technology; self-modulated MEMS infrared light source; single crystalline silicon; Boron; Choppers; Crystallization; Etching; Infrared detectors; Infrared spectra; Light sources; Micromechanical devices; Optical filters; Silicon; MEMS; infrared light source; lifetime; self-modulation; silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

SICE, 2007 Annual Conference

Conference_Location

Takamatsu

Print_ISBN

978-4-907764-27-2

Electronic_ISBN

978-4-907764-27-2

Type

conf

DOI

10.1109/SICE.2007.4421400

Filename

4421400