Title :
Modelling and active vibration control of a turbomolecular vacuum pump
Author :
Piroddi, Luigi ; Leva, Alberto ; Casaro, Fausto
Author_Institution :
Dipartimento di Elettronica e Informazione, Politecnico di Milano, via Ponzio 34/5, 20133, Italy
Abstract :
This manuscript presents an experimental activity aimed at modeling a turbo-molecular vacuum pump, and designing an active vibration control system. After describing the experimental setup, a data-based frequency domain model of the pump is illustrated. Some possible control design strategies for broadband and/or narrowband vibration reduction are then discussed. Simulations and (preliminary) experimental results are reported, to evaluate and compare the proposed control design solutions.
Keywords :
Accelerometers; Control design; Damping; Flanges; Frequency estimation; Piezoelectric actuators; Shock absorbers; Vacuum systems; Vacuum technology; Vibration control;
Conference_Titel :
Computer Aided Control System Design, 2006 IEEE International Conference on Control Applications, 2006 IEEE International Symposium on Intelligent Control, 2006 IEEE
Conference_Location :
Munich, Germany
Print_ISBN :
0-7803-9797-5
Electronic_ISBN :
0-7803-9797-5
DOI :
10.1109/CACSD-CCA-ISIC.2006.4776798
