Title :
Experimental study of the influence of plasma confinement conditions on ions in a multipolar ECR plasma reactor
Author :
King, G.L. ; Mak, Pui-In ; Grotjohn, Timothy A. ; Asmussen, J.
Author_Institution :
Michigan State University
Keywords :
Diodes; Electrothermal launching; Impedance; Magnets; Plasma applications; Plasma confinement; Plasma measurements; Plasma sources; Programmable logic arrays; Voltage;
Conference_Titel :
Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
Conference_Location :
Tampa, FL, USA
Print_ISBN :
0-7803-0716-X
DOI :
10.1109/PLASMA.1992.697768
