Title :
Planar broadband dual-linearly polarized MEMS steerable antenna
Author :
Woten, Douglas A. ; El-Shenawee, Magda ; Tung, Steve
Author_Institution :
Microelectron.-Photonics Program, Univ. of Arkansas, Fayetteville, AR, USA
Abstract :
In this work we will present the fabrication process and preliminary experimental results of a MEMS steerable broadband antenna. The antenna is designed to fit on a 1cm x 1cm silicon platform with a thin benzocyclobutene (BCB) dielectric coating and operate between 4-9GHz. The modified Fourpoint antenna is simulated using ANSOFT High Frequency Structure Simulator (HFSS) and has a return loss of less than -10dB in the operating band.
Keywords :
broadband antennas; micromechanical devices; planar antennas; benzocyclobutene dielectric coating; modified Fourpoint antenna; planar broadband dual-linearly polarized MEMS steerable antenna; Broadband antennas; Copper; Etching; Fabrication; Frequency; Metallization; Micromechanical devices; Polarization; Silicon; Titanium;
Conference_Titel :
Antennas and Propagation Society International Symposium, 2009. APSURSI '09. IEEE
Conference_Location :
Charleston, SC
Print_ISBN :
978-1-4244-3647-7
DOI :
10.1109/APS.2009.5171568
