Uniform and long-slit microwave plasma generation from a longitudinal section electric mode coupling

Author

Kim, Hae Jin ; Choi, Jin Joo ; Hong, Jung Mi

Author_Institution

Dept. of Radio Sci. & Eng., Kwangwoon Univ., Seoul

fYear

2006

fDate

4-8 June 2006

Firstpage

58

Lastpage

58

Abstract

Summary form only given. A stable uniform, long-slit atmospheric argon plasma is produced by coupling a longitudinal section electric (LSE) mode in a dielectric loaded rectangular waveguide. The microwave-induced plasma discharge system consists of a 2.45 GHz microwave source, circulator, 3-stub tuner, transformer, and tapered rectangular waveguide loaded with two dielectric slabs. A uniform 98 mm long atmospheric argon plasma is observed at a relatively low microwave power level of 350 W and gas flow rate of I0-15 liters per minute

Keywords

argon; dielectric-loaded waveguides; high-frequency discharges; plasma instability; plasma sources; 2.45 GHz; 3-stub tuner; 350 W; 98 mm; Ar; circulator; dielectric loaded rectangular waveguide; dielectric slabs; electric mode coupling; long-slit microwave plasma generation; microwave source; microwave-induced plasma discharge; transformer; Argon; Atmospheric waves; Couplings; Dielectrics; Loaded waveguides; Microwave generation; Plasma sources; Plasma stability; Plasma waves; Rectangular waveguides;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Science, 2006. ICOPS 2006. IEEE Conference Record - Abstracts. The 33rd IEEE International Conference on

Conference_Location

Traverse City, MI

Print_ISBN

1-4244-0125-9

Type

conf

DOI

10.1109/PLASMA.2006.1706930

Filename

1706930