Title :
In Situ Processing And Epitaxial Growth
Author_Institution :
AT& TBell Labs, Murraay Hill, NJ
fDate :
29 Jul-2 Aug 1991
Keywords :
Cleaning; Contamination; Dielectrics; Dry etching; Epitaxial growth; Lithography; Molecular beam epitaxial growth; Process design; Substrates; Wires;
Conference_Titel :
Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on
Print_ISBN :
0-87942-618-7
DOI :
10.1109/LEOSST.1991.638946
