DocumentCode
2645658
Title
Measurements on an argon helicon plasma with variable magnetic nozzle
Author
Denning, C. Mark ; Scharer, John E.
Author_Institution
Dept. of Electr. & Comput. Eng., Wisconsin Univ., Madison, WI
fYear
2006
fDate
4-8 June 2006
Firstpage
101
Lastpage
101
Abstract
Summary form only given. The possible existence of a plasma double layer arising at the field gradient of a magnetic nozzle is investigated in a high-density (1013 cm-3), 13.56 MHz radiofrequency (RF) argon helicon plasma with high fractional ionization (>90%). A half-turn double helix antenna couples RF power to the low pressure (mtorr) gas in a 10-cm-diameter, 2-m-long cylindrical Pyrex chamber. The gas flows continuously, fed into the chamber upstream from the turbo pump. Several electromagnets produce a static axial magnetic field, and can be repositioned to produce a wide range of field profiles. Magnetic field strengths range from up to 1 kG in the antenna region to up to 1.5 kG at the peak of the downstream magnetic nozzle. Laser-induced fluorescence (LIF) is used to measure the ion energy distribution function to determine drift velocity and temperature along the experimental axis. The tunable diode laser is centered at 668 nm, and the wavelength is monitored by iodine cell absorption, which provides the fine resolution (0.0001 nm) that is required by the LIF diagnostic. Plasma potential measurements are made via a Langmuir probe to determine the potential profile in the plasma in the presence of the magnetic nozzle and to determine if a double layer forms. Power scaling of up to 3 kW of input RF power is also performed to determine the effect on double layer formation. Additionally, RF field measurements are made via B-dot probe and correlated with Ar II optical emission to characterize the helicon wave propagation under a variety of magnetic nozzle configurations
Keywords
Langmuir probes; antennas in plasma; argon; ionisation; plasma light propagation; plasma sheaths; plasma sources; plasma temperature; plasma transport processes; 1 to 1.5 kG; 10 cm; 13.56 MHz; 2 m; 3 kW; 668 nm; Ar; B-dot probe; Langmuir probe; cylindrical Pyrex chamber; double helix antenna; drift velocity; electromagnets; fractional ionization; helicon wave propagation; iodine cell absorption; ion energy distribution; laser-induced fluorescence; optical emission; plasma double layer; plasma potential; power scaling; radiofrequency argon helicon plasma; static axial magnetic field; tunable diode laser; turbo pump; variable magnetic nozzle; Argon; Ionization; Magnetic field measurement; Plasma diagnostics; Plasma measurements; Plasma temperature; Plasma waves; Probes; Radio frequency; Wavelength measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 2006. ICOPS 2006. IEEE Conference Record - Abstracts. The 33rd IEEE International Conference on
Conference_Location
Traverse City, MI
Print_ISBN
1-4244-0125-9
Type
conf
DOI
10.1109/PLASMA.2006.1706973
Filename
1706973
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