DocumentCode :
2646298
Title :
Simulating Oxygen RF Discharges with a kinetic PIC-MCC code
Author :
Vahedi, V. ; Lieberman, M.A. ; DiPeso, G. ; Birdsall, C.K. ; Rognlien, T.D. ; Hiskes, J.R. ; Cohen, Ronald H.
Author_Institution :
UC Berkeley
fYear :
1993
fDate :
1-3 June 1993
Firstpage :
100
Lastpage :
100
Keywords :
Charge transfer; Electrons; Ionization; Kinetic theory; Laboratories; Monte Carlo methods; Oxygen; Radio frequency; Spontaneous emission; Surface discharges;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
Conference_Location :
Tampa, FL, USA
Print_ISBN :
0-7803-0716-X
Type :
conf
DOI :
10.1109/PLASMA.1992.697794
Filename :
697794
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2646298
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