• DocumentCode
    2646328
  • Title

    A Hybrid Hydrodynamic-monte Carlo Simulation Of the transport of neutral radicals in low pressure remote plasma sources

  • Author

    Hartig, M.J. ; Kushner, Mark J.

  • Author_Institution
    University of Illinois
  • fYear
    1993
  • fDate
    1-3 June 1993
  • Firstpage
    101
  • Lastpage
    101
  • Keywords
    Chemicals; Gases; Inductors; Monte Carlo methods; Plasma applications; Plasma chemistry; Plasma materials processing; Plasma sources; Plasma transport processes; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
  • Conference_Location
    Tampa, FL, USA
  • Print_ISBN
    0-7803-0716-X
  • Type

    conf

  • DOI
    10.1109/PLASMA.1992.697796
  • Filename
    697796
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2646328