Title :
A Hybrid Hydrodynamic-monte Carlo Simulation Of the transport of neutral radicals in low pressure remote plasma sources
Author :
Hartig, M.J. ; Kushner, Mark J.
Author_Institution :
University of Illinois
Keywords :
Chemicals; Gases; Inductors; Monte Carlo methods; Plasma applications; Plasma chemistry; Plasma materials processing; Plasma sources; Plasma transport processes; Substrates;
Conference_Titel :
Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
Conference_Location :
Tampa, FL, USA
Print_ISBN :
0-7803-0716-X
DOI :
10.1109/PLASMA.1992.697796
