A Stochastic Integral Equation Method for Resistance Extraction of Conductors with Random Rough Surfaces

Due to the decreasing skin depth in high-frequency analog and digital circuits, surface roughness is playing an increasingly important role in interconnect parasitic extraction. However, the inaccessibility of detailed surface description and the complicated electromagnetic (EM) nature baffle satisfactory solutions to this kind of problems. In this paper, a new stochastic integral equation method is proposed to quantitively evaluate the impact of surface roughness on the frequency-dependent resistance extraction for interconnects. The surface information is given by statistical description instead of explicit functions. The direct derivation of the expected value of the surface integral equation of the EM wave eliminates the need of time-consuming Monte Carlo simulations. Numerical results verify the accuracy of the proposed method