Title :
Fabrication of thin-film V-groove inductors using composite magnetic materials
Author :
Prabhakaran, Satish ; Kreider, Daniel E. ; Lin, Yu ; Sullivan, Charles R. ; Levey, Christopher G.
Author_Institution :
Thayer Sch. of Eng., Dartmouth Coll., Hanover, NH, USA
Abstract :
A new fabrication process is described for high performance embedded or integrated inductors for power converters. The process includes etching V-grooves in a silicon substrate, depositing granular composite magnetic materials, and electroplating the copper conductors
Keywords :
electroplating; etching; magnetic particles; power convertors; power inductors; semiconductor device metallisation; Cu; Si; V-groove etching; composite magnetic materials; copper conductors; electroplating; embedded inductors; fabrication process; granular composite magnetic materials; integrated inductors; power converters; silicon substrate; thin-film V-groove inductor fabrication; thin-film V-groove inductors; Fabrication; Integrated circuit packaging; Magnetic films; Magnetic flux; Magnetic materials; Magnetic separation; Semiconductor thin films; Silicon; Substrates; Thin film inductors;
Conference_Titel :
Integrated Power Packaging, 2000. IWIPP 2000. International Workshop on
Conference_Location :
Waltham, MA
Print_ISBN :
0-7803-6437-6
DOI :
10.1109/IWIPP.2000.885191
