Title :
A low cost polyimide based metal oxide film RH sensor
Author :
Mahboob, Md Rahat ; Islam, Tarikul ; Zargar, Zubair H. ; Khan, Shakeb A.
Author_Institution :
Dept. of Electr. Eng., J.M.I. (Univ.), New Delhi, India
Abstract :
A simple flexible metal oxide (γ-Al2O3) film based parallel plate capacitive humidity sensor has been fabricated by sol-gel method on UPILEX-S polyimide substrate for measuring relative humidity (RH). The important features of the sensor are easy to fabricate, no shorting problem, highly flexible, bulk producible and can be integrated with signal conditioning unit. The characteristics of the sensor have been studied with humidity in the range of 5 to 85 % RH. The measured sensitivity of the sensor is 4.044 pF/% RH The sensor output is found to be highly stable and reproducible up to 0.4% The response and recovery time are 244s and 159s respectively.
Keywords :
alumina; capacitive sensors; humidity sensors; signal conditioning circuits; sol-gel processing; thin films; Al2O3; UPILEX-S polyimide substrate; low cost polyimide; metal oxide film RH sensor; parallel plate capacitive humidity sensor; recovery time; relative humidity; response time; signal conditioning unit; sol-gel method; Capacitance; Films; Humidity; Moisture; Polyimides; Sensors; Substrates; flexible RFID; humidity sensing; metal oxide; polyimide;
Conference_Titel :
Industrial and Information Systems (ICIIS), 2014 9th International Conference on
Conference_Location :
Gwalior
Print_ISBN :
978-1-4799-6499-4
DOI :
10.1109/ICIINFS.2014.7036497
