A low cost polyimide based metal oxide film RH sensor

Author

Mahboob, Md Rahat ; Islam, Tarikul ; Zargar, Zubair H. ; Khan, Shakeb A.

Author_Institution

Dept. of Electr. Eng., J.M.I. (Univ.), New Delhi, India

fYear

2014

fDate

15-17 Dec. 2014

Firstpage

1

Lastpage

5

Abstract

A simple flexible metal oxide (γ-Al₂O₃) film based parallel plate capacitive humidity sensor has been fabricated by sol-gel method on UPILEX-S polyimide substrate for measuring relative humidity (RH). The important features of the sensor are easy to fabricate, no shorting problem, highly flexible, bulk producible and can be integrated with signal conditioning unit. The characteristics of the sensor have been studied with humidity in the range of 5 to 85 % RH. The measured sensitivity of the sensor is 4.044 pF/% RH The sensor output is found to be highly stable and reproducible up to 0.4% The response and recovery time are 244s and 159s respectively.

Keywords

alumina; capacitive sensors; humidity sensors; signal conditioning circuits; sol-gel processing; thin films; Al₂O₃; UPILEX-S polyimide substrate; low cost polyimide; metal oxide film RH sensor; parallel plate capacitive humidity sensor; recovery time; relative humidity; response time; signal conditioning unit; sol-gel method; Capacitance; Films; Humidity; Moisture; Polyimides; Sensors; Substrates; flexible RFID; humidity sensing; metal oxide; polyimide;

fLanguage

English

Publisher

ieee

Conference_Titel

Industrial and Information Systems (ICIIS), 2014 9th International Conference on

Conference_Location

Gwalior

Print_ISBN

978-1-4799-6499-4

Type

conf

DOI

10.1109/ICIINFS.2014.7036497

Filename

7036497