Towards a free open source process and device simulation framework

We present an approach for implementing open source simulation tools in the field of semiconductor device and process simulation based on our execution framework ViennaX. We apply a modular concept, where functionality is separated into plugins, which in turn can be combined to form full-fledged simulation tools by utilizing ViennaX´s task graph approach. Due to the applied plugin concept, a high degree of flexibility is introduced, as components can be easily exchanged. Simulation results are shown, depicting the applicability of our approach for different tools.