• DocumentCode
    2647895
  • Title

    Fabrication Of Silica Waveguides On Silicon

  • Author

    Kazarinov, R.F. ; Henry, C.H.

  • fYear
    1991
  • fDate
    29 Jul-2 Aug 1991
  • Firstpage
    7
  • Lastpage
    7
  • Keywords
    Glass; Lithography; Optical device fabrication; Optical devices; Optical filters; Optical planar waveguides; Optical reflection; Optical waveguides; Planar waveguides; Silicon compounds;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on
  • Print_ISBN
    0-87942-618-7
  • Type

    conf

  • DOI
    10.1109/LEOSST.1991.638985
  • Filename
    638985
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2647895