Title :
Fabrication Of Silica Waveguides On Silicon
Author :
Kazarinov, R.F. ; Henry, C.H.
fDate :
29 Jul-2 Aug 1991
Keywords :
Glass; Lithography; Optical device fabrication; Optical devices; Optical filters; Optical planar waveguides; Optical reflection; Optical waveguides; Planar waveguides; Silicon compounds;
Conference_Titel :
Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on
Print_ISBN :
0-87942-618-7
DOI :
10.1109/LEOSST.1991.638985
