• DocumentCode
    2647915
  • Title

    Ion Beam Machining Of Optoelectronic Components

  • Author

    Scherer, A. ; Soole, J. ; Lee, H. ; Beebe, E. ; Orenstein, M. ; Bhat, R.

  • Author_Institution
    Bellcore
  • fYear
    1991
  • fDate
    29 Jul-2 Aug 1991
  • Firstpage
    8
  • Lastpage
    9
  • Keywords
    Diffraction gratings; Etching; Ion beams; Laser beam cutting; Machining; Mirrors; Optical reflection; Semiconductor laser arrays; Surface emitting lasers; Vertical cavity surface emitting lasers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on
  • Print_ISBN
    0-87942-618-7
  • Type

    conf

  • DOI
    10.1109/LEOSST.1991.638986
  • Filename
    638986
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2647915