Title :
Ion Beam Machining Of Optoelectronic Components
Author :
Scherer, A. ; Soole, J. ; Lee, H. ; Beebe, E. ; Orenstein, M. ; Bhat, R.
Author_Institution :
Bellcore
fDate :
29 Jul-2 Aug 1991
Keywords :
Diffraction gratings; Etching; Ion beams; Laser beam cutting; Machining; Mirrors; Optical reflection; Semiconductor laser arrays; Surface emitting lasers; Vertical cavity surface emitting lasers;
Conference_Titel :
Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on
Print_ISBN :
0-87942-618-7
DOI :
10.1109/LEOSST.1991.638986
