2648153

Fabrication Of Circular Gratings On Lnp By E-beam Lithography And Reactive Ion Etching

Fallahi, M. ; Wu, C. ; Maritan, C. ; Fox, K. ; Blaauw, C.

National Research Council (NRC) and Solid-State Opto-Electronics Consortium(SSOC) Ottawa, Ontario, KIA 0R6, Canada

1991

29 Jul-2 Aug 1991

14

15

Design automation; Electron beams; Etching; Fabrication; Gratings; Indium phosphide; Lithography; Resists; Scanning electron microscopy; Surface emitting lasers;

English

ieee

Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on

0-87942-618-7

conf

10.1109/LEOSST.1991.638990

638990