Damped Aero-Acoustic Microphone With Improved High-Frequency Characteristics

Author

Zhijian Zhou ; Rufer, Libor ; Man Wong

Author_Institution

Hong Kong Univ. of Sci. & Technol., Hong Kong, China

Volume

23

Issue

5

fYear

2014

fDate

Oct. 2014

Firstpage

1094

Lastpage

1100

Abstract

With the mechanical resonance damped using a perforated back-plate underneath the sensing diaphragm, a piezoresistive aero-acoustic microphone with improved high-frequency characteristics is demonstrated. The sensing diaphragm and the damper back-plate were monolithically integrated in one process flow. The microphone was calibrated using a high-voltage electrical spark-discharge acoustic N-wave source. A sensitivity of ~0.33 μV/V/Pa, a bandwidth of ~520 kHz at 3-dB attenuation, and a significant damping of the mechanical resonance were realized.

Keywords

acoustic radiators; damping; diaphragms; microfabrication; microphones; microsensors; resonance; sparks; damped aero-acoustic microphone; damper back-plate; high-voltage electrical spark discharge acoustic N-wave source; mechanical resonance damping; monolithic integration; perforated back-plate underneath; process flow; sensing diaphragm; Acoustics; Damping; Microphones; Sensitivity; Sensors; Shock absorbers; Silicon; Aero-acoustic; metal-induced crystallization; microphone; perforated back-plate; piezoresistive; squeezed-film damping; wideband; wideband.;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.2014.2304730

Filename

6747360