Dynamic property test of a novel high g microaccelerometer

Aiming at the testing requirement in special situations, a kind of high overloading piezoresistive acceleration sensor with a beam-island structure, four sides of which are fixed, is designed. This acceleration sensor uses ceramic package and is encapsulated by nitrogen. Adjusting the dynamic speciality by Hopkinson impact equipment, the testing result indicates that the sensitivity and the linearity of the high g accelerometer are good, and the shock-resistibility is also in good state. The structure is still good and can output signals after impacted by 200 000 g, meanwhile it can effectively satisfy special testing requirements such as acutely impact and vibration.