A novel preamplifier for MEMS microphone

Author

Hua, Siliang ; Liu, Yan ; Zhang, Jian En ; Wang, Donghui ; Hou, Chaohuan

Author_Institution

Digital Syst. Integration Lab., Chinese Acad. of Sci., China

fYear

2009

fDate

20-23 Oct. 2009

Firstpage

636

Lastpage

638

Abstract

MEMS microphone is used in various mobile devices, notebook applications, and hearing aids. This paper analyzes the electric model of the MEMS microphone elaborately and presents a preamplifier for MEMS Microphone. The preamplifier is realized in 0.18 Â¿m CMOS HV technology which provides high bias voltage, impedance match and weak signal preamplifying with an area of 1050 Â¿m*900 Â¿m. The post-layout simulation results show that it can operate under 1.5 V~3.6 V with 56 Â¿V_RMS equivalent input noise.

Keywords

CMOS integrated circuits; impedance matching; micromechanical devices; microphones; preamplifiers; CMOS HV technology; MEMS; bias voltage; electric model; equivalent input noise; impedance match; microphone; post-layout simulation; preamplifier; voltage 1.5 V to 3.6 V; CMOS technology; Circuit simulation; Hearing aids; Impedance; Micromechanical devices; Microphones; Preamplifiers; Semiconductor device modeling; Silicon; Voltage; MEMS microphone; Preamplifier; electric model; impedance match;

fLanguage

English

Publisher

ieee

Conference_Titel

ASIC, 2009. ASICON '09. IEEE 8th International Conference on

Conference_Location

Changsha, Hunan

Print_ISBN

978-1-4244-3868-6

Electronic_ISBN

978-1-4244-3870-9

Type

conf

DOI

10.1109/ASICON.2009.5351326

Filename

5351326