On-chip spiral inductors synthesis by moving leastsquares approximation

In this paper, moving least-squares approximation is firstly applied to synthesize on-chip spiral inductors. 41 circular inductors with different number of turns and different radii were fabricated. Their equivalent circuit parameters in double-¿ topology were extracted through linear regression. Moving least-squares approximation is employed to construct parameters values in any geometric dimensions of inductors according to parameters extracted from 36 inductors. To validate the effectiveness of proposed analysis, another 5 inductors is employed to demonstrate the synthesis results of inductor turns and radii. The synthesis is accurate with a frequency range from 100 MHz to 15 GHz in both quality factor and inductance. The results show that this method is useful in establishing scalable model according to geometric dimensions of inductors.