DocumentCode
2650550
Title
Microwave field distribution in a new atmospheric pressure microwave plasma (APMP) system
Author
Liu, Liang ; Zhang, Guixin ; Zhu, Zhijie ; Li, Yinan
Author_Institution
Dept. of Electr. Eng., Tsinghua Univ., Beijing
fYear
2006
fDate
4-8 June 2006
Firstpage
356
Lastpage
356
Abstract
Summary form only given. The production and maintenance of microwave plasma under the atmospheric condition have always been the major concern of researches. Some scientists used waveguide as cavity to produce a plasma jet, while the mass of microwave plasma was relatively hard to receive in atmospheric pressure. However, a few research institutes and companies have already developed mass of atmospheric pressure microwave plasma (APMP), such as CYRANNUS series, which can be widely applied. In this paper, we design a system to excite mass of APMP, emulate the chamber through software and measure the microwave field distribution to validate. This research can build a theoretical basis of microwave plasma excitation position and other characteristics under one atmospheric pressure. It will be useful in further study of the APMP
Keywords
plasma jets; plasma sources; 1 atm; CYRANNUS series; atmospheric pressure microwave plasma; microwave field distribution; microwave plasma excitation; plasma jet; waveguide; Atmospheric waves; Atmospheric-pressure plasmas; Discharges; IEEE Transactions on Plasma Science; Laboratories; Plasma chemistry; Plasma materials processing; Plasma measurements; Plasma properties; Plasma waves;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 2006. ICOPS 2006. IEEE Conference Record - Abstracts. The 33rd IEEE International Conference on
Conference_Location
Traverse City, MI
Print_ISBN
1-4244-0125-9
Type
conf
DOI
10.1109/PLASMA.2006.1707229
Filename
1707229
Link To Document