• DocumentCode
    2650550
  • Title

    Microwave field distribution in a new atmospheric pressure microwave plasma (APMP) system

  • Author

    Liu, Liang ; Zhang, Guixin ; Zhu, Zhijie ; Li, Yinan

  • Author_Institution
    Dept. of Electr. Eng., Tsinghua Univ., Beijing
  • fYear
    2006
  • fDate
    4-8 June 2006
  • Firstpage
    356
  • Lastpage
    356
  • Abstract
    Summary form only given. The production and maintenance of microwave plasma under the atmospheric condition have always been the major concern of researches. Some scientists used waveguide as cavity to produce a plasma jet, while the mass of microwave plasma was relatively hard to receive in atmospheric pressure. However, a few research institutes and companies have already developed mass of atmospheric pressure microwave plasma (APMP), such as CYRANNUS series, which can be widely applied. In this paper, we design a system to excite mass of APMP, emulate the chamber through software and measure the microwave field distribution to validate. This research can build a theoretical basis of microwave plasma excitation position and other characteristics under one atmospheric pressure. It will be useful in further study of the APMP
  • Keywords
    plasma jets; plasma sources; 1 atm; CYRANNUS series; atmospheric pressure microwave plasma; microwave field distribution; microwave plasma excitation; plasma jet; waveguide; Atmospheric waves; Atmospheric-pressure plasmas; Discharges; IEEE Transactions on Plasma Science; Laboratories; Plasma chemistry; Plasma materials processing; Plasma measurements; Plasma properties; Plasma waves;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 2006. ICOPS 2006. IEEE Conference Record - Abstracts. The 33rd IEEE International Conference on
  • Conference_Location
    Traverse City, MI
  • Print_ISBN
    1-4244-0125-9
  • Type

    conf

  • DOI
    10.1109/PLASMA.2006.1707229
  • Filename
    1707229