Title :
Low-damage Dry Etching Of Optoelectronic Devices: Assessment And Solutions
Author_Institution :
University of California, Santa Barbara, CA
fDate :
29 Jul-2 Aug 1991
Keywords :
Dry etching; Optoelectronic devices; Spontaneous emission; Surface treatment;
Conference_Titel :
Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on
Print_ISBN :
0-87942-618-7
DOI :
10.1109/LEOSST.1991.639004
