Modeling and design of a hybrid MEMS motor

This paper addresses the design of a new hybrid MEMS micromotor. It gives insights on the choices, which led to the fabrication of a small 3-phases axial flux BLDC motor. The stator is developed following the almost CMOS technology rules used for MEMS manufacturing and the coils have two copper layers. The rotor is made of a ring permanent magnet assembled over the stator chip. The stator design has been performed using an analytical model presented in the paper and validated using finite elements and measurements on the prototype.