Micromanipulator with integrated force sensor based on compliant parallel mechanism

Author

Liang, Qiaokang ; Zhang, Dan ; Song, Quanjun ; Ge, Yunjian

Author_Institution

Inst. of Intell. Machines, Univ. of Sci. & Technol. of China (USTC), Hefei, China

fYear

2010

fDate

14-18 Dec. 2010

Firstpage

709

Lastpage

714

Abstract

Movement in micro-scale precision cannot be achieved by unaided human hand. This paper describes the design of a six degrees of freedom (DOF) micromanipulator based on compliant parallel mechanism. It is capable of delivering 6-DOF pure motions with high precision and featured by piezo-driven actuators, flexure hinges and integrated force sensor that can provide the system with real-time force information for feedback control. The static features of such a mechanism include high positioning accuracy, structural compactness and smooth and continuous displacements.

Keywords

actuators; feedback; force sensors; micromanipulators; 6-DOF pure motions; compliant parallel mechanism; continuous displacements; degrees of freedom; feedback control; flexure hinges; high positioning accuracy; integrated force sensor; micromanipulator; microscale precision; piezo-driven actuators; real-time force information; smooth displacements; static features; structural compactness; Actuators; Bridge circuits; Force; Joints; Manipulators; Robot sensing systems; Strain;

fLanguage

English

Publisher

ieee

Conference_Titel

Robotics and Biomimetics (ROBIO), 2010 IEEE International Conference on

Conference_Location

Tianjin

Print_ISBN

978-1-4244-9319-7

Type

conf

DOI

10.1109/ROBIO.2010.5723413

Filename

5723413