• DocumentCode
    2651519
  • Title

    RIBE And RIE For Micro Cavity Surface Emitting Lasers Technology And Damage Characterization

  • Author

    Iga, K. ; Koyama, F. ; Matsutani, A.

  • Author_Institution
    Tokyo Institute of Technology
  • fYear
    1991
  • fDate
    29 Jul-2 Aug 1991
  • Firstpage
    39
  • Lastpage
    40
  • Keywords
    Chemicals; DH-HEMTs; Dry etching; Gallium arsenide; Indium phosphide; Microcavities; Nonhomogeneous media; Sputter etching; Surface emitting lasers; Vertical cavity surface emitting lasers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on
  • Print_ISBN
    0-87942-618-7
  • Type

    conf

  • DOI
    10.1109/LEOSST.1991.639008
  • Filename
    639008
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2651519