DocumentCode :
2651538
Title :
Micromachined Semi-encapsulated Spiral Inductors For Microelectromechanical Systems (MEMS) Applications
Author :
Sadler, D.J. ; Wenjin Zhang ; Chong H.Ahn ; Hi Jung Kim ; Suk Hee Han
Author_Institution :
University Of Cincinnati
fYear :
1997
fDate :
1-4 April 1997
Keywords :
Frequency; Glass; Inductors; Magnetic flux; Magnetic sensors; Microactuators; Microelectromechanical systems; Micromechanical devices; Silicon; Spirals;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Magnetics Conference, 1997. Digests of INTERMAG '97., 1997 IEEE International
Conference_Location :
New Orleans, LA, USA
Print_ISBN :
0-7803-3862-6
Type :
conf
DOI :
10.1109/INTMAG.1997.597680
Filename :
597680
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2651538
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