• DocumentCode
    2651802
  • Title

    Characteristics and sensitivity of p-type junctionless gate-all-around nanowire transistor

  • Author

    Han, Ming-Hung ; Jhan, Yi-Ruei ; Wu, Jia-Jiun ; Chen, Hung-Bin ; Wu, Yung-Chun ; Chang, Chun-Yen

  • Author_Institution
    Dept. of Electron. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan
  • fYear
    2012
  • fDate
    10-11 June 2012
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    In this study, we for the first time assess the characteristics and sensitivity of p-type junctionless (JL) gate-all around (GAA) nanowire transistor using 3D quantum transport device simulation for CMOS technology implementation. Since the doping concentration of p-type junctionless nanowire transistor does not as high as in n-type device due solid solubility of boron in silicon, it can be made by using midgap gate electrode material for appropriate threshold voltage. The p-type JLGAA transistor shows good on/off current ratio and better short channel characteristics compare to conventional inversion mode GAA structure. The sensitivity analyses show that the channel thickness affects the device performance such as threshold voltage (Vth), on current (Ion), and off current (Ioff) significantly. In contrast, the channel length and oxide thickness have less impact owing to well control of short channel effect.
  • Keywords
    CMOS integrated circuits; MOSFET; boron; doping profiles; elemental semiconductors; nanowires; semiconductor device models; sensitivity analysis; silicon; solid solubility; 3D quantum transport device simulation; CMOS technology implementation; Si:B; appropriate threshold voltage; boron; channel length; channel thickness; conventional inversion mode GAA structure; device performance; doping concentration; midgap gate electrode material; on-off current ratio; p-type JLGAA transistor; p-type junctionless gate-all-around nanowire transistor; p-type junctionless nanowire transistor; sensitivity analysis; short channel characteristics; short channel effect; silicon; solid solubility; threshold voltage; Doping; Electric fields; Logic gates; Nanoscale devices; Sensitivity; Threshold voltage; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Silicon Nanoelectronics Workshop (SNW), 2012 IEEE
  • Conference_Location
    Honolulu, HI
  • ISSN
    2161-4636
  • Print_ISBN
    978-1-4673-0996-7
  • Electronic_ISBN
    2161-4636
  • Type

    conf

  • DOI
    10.1109/SNW.2012.6243304
  • Filename
    6243304