Title :
Device structure for the characterization of nanowire thermocouples
Author :
Szakmany, Gergo P. ; Krenz, Peter M. ; Orlov, Alexei O. ; Bernstein, Gary H. ; Porod, Wolfgang
Author_Institution :
Dept. of Electr. Eng., Univ. of Notre Dame, Notre Dame, IN, USA
Abstract :
In order to demonstrate the feasibility of this approach, we report the measurements of the Seebeck coefficients of a palladium-gold and a palladium-chrome nanowire (70 nm wide and 50 nm thick) thermocouple. The thermocouple, heater, and thermometers were fabricated on top of 640 nm of thermally grown SiO2 on a silicon wafer using electron beam lithography and electron beam evaporation.
Keywords :
Seebeck effect; chromium; electron beam lithography; gold; nanowires; palladium; thermocouples; thermometers; Pd-Au; Pd-Cr; Seebeck coefficients; device structure; electron beam evaporation; electron beam lithography; nanowire thermocouple characterization; palladium-chrome nanowire thermocouple; palladium-gold nanowire thermocouple; silicon wafer; size 50 nm; size 70 nm; thermal growth; Current measurement; Heating; Junctions; Metals; Nanoscale devices; Temperature measurement; Voltage measurement;
Conference_Titel :
Silicon Nanoelectronics Workshop (SNW), 2012 IEEE
Conference_Location :
Honolulu, HI
Print_ISBN :
978-1-4673-0996-7
Electronic_ISBN :
2161-4636
DOI :
10.1109/SNW.2012.6243307
