An extended PI model for hysteresis and creep compensation in AFM based nanomanipulation

One of the prerequisites for AFM based nanomanipulation is that the tip position can be controlled accurately, while this prerequisite is still hindered by the large model uncertainties aroused from PZT nonlinearity such as hysteresis and creep. In this paper, an Extended Prandtl-Ishlinskii (EPI) model is proposed to solve these problems. The main advantage of EPI model over conventional PI model is that the EPI model can compensate the positioning error caused by hysteresis and creep simultaneously through adopting the new adaptive basic operator. The experimental results demonstrate the effectiveness and validity of EPI model in depicting the PZT hysteresis and creep prosperities.