Design and analysis of a completely decoupled compliant parallel XY micro-motion stage

With the purpose of designing a completely decoupled XY micro-motion stage, a novel flexure hinge-based compliant parallel mechanism driven by piezoelectric actuators (PZT) is presented in this paper. The mechanism with a double symmetric structure is constructed by employing double fourbar flexures as prismatic joints due to their better stiffness performance. To obtain an accurate model, matrix method is applied for the compliance analysis. Then the dynamics model is derived via Lagrange equation. Finally, finite element analysis (FEA) is carried out using ANSYS software to validate the models and evaluate the performance of the mechanism. The simulation results also reveal that the mechanism has ideal linearity in terms of the static properties.