Title :
Analysis Of Surface Roughness On Semiconductor Laser Etched Facets
Author :
Herrick, Robert W. ; Sabo, Lori G. ; Levy, Joseph L.
Author_Institution :
McDonnell Douglas Electronic Systems Company
fDate :
29 Jul-2 Aug 1991
Keywords :
Etching; Fourier transforms; Frequency; Grain size; Mirrors; Rough surfaces; Semiconductor lasers; Size control; Surface emitting lasers; Surface roughness;
Conference_Titel :
Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on
Print_ISBN :
0-87942-618-7
DOI :
10.1109/LEOSST.1991.639011
