Abstract :
The following topics are dealt with: test structure fundamentals; CMOS process qualification; nanowires; MEMS; capacitance; yield and parameter extraction; RF and noise characterisation; process technology; dielectrics; variability; temperature characterisation and matching.
Keywords :
CMOS integrated circuits; integrated circuit noise; integrated circuit testing; integrated circuit yield; micromechanical devices; nanowires; CMOS process qualification; MEMS; RF characterisation; capacitance; dielectrics; matching; nanowires; noise characterisation; parameter extraction; process technology; temperature characterisation; test structure fundamentals; variability; yield;
Conference_Titel :
Microelectronic Test Structures (ICMTS), 2011 IEEE International Conference on
Conference_Location :
Amsterdam
Print_ISBN :
978-1-4244-8526-0
Electronic_ISBN :
1071-9032
DOI :
10.1109/ICMTS.2011.5976849
