Title :
Mechanical variation of plasma potential, electron temperature and plasma density in a multi-dipole RF glow discharge
Author :
Hershkowitz, Noah
Author_Institution :
Universiyt of Wisconsin
Keywords :
Electrons; Ion beams; Magnetic confinement; Manufacturing; Plasma confinement; Plasma density; Plasma devices; Plasma materials processing; Plasma temperature; Tellurium;
Conference_Titel :
Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
Conference_Location :
Tampa, FL, USA
Print_ISBN :
0-7803-0716-X
DOI :
10.1109/PLASMA.1992.697843
