Title :
Admittance characterization and interface trap property extraction for Ge/III-V MOS structures
Author_Institution :
IMEC, Belgium
Abstract :
MOS admittance characteristics, essential for extracting crucial parameters of MOS devices, can be heavily distorted because of Ge/III-V properties such as poor interface passivation and bandgap. These distortions can result in far-reaching misinterpretations and large errors in extracted parameters. The differing admittance characteristics and related adapted interface trap extraction methods are elaborated for Ge/III-V MOS.
Keywords :
III-V semiconductors; MIS devices; elemental semiconductors; energy gap; germanium; passivation; Ge; Ge/III-V MOS structures; MOS admittance; MOS devices; admittance characterization; bandgap; interface passivation; interface trap extraction; interface trap property extraction; Admittance; Conferences; Face; MOS devices; Microelectronics; Passivation; Photonic band gap;
Conference_Titel :
Microelectronic Test Structures (ICMTS), 2011 IEEE International Conference on
Conference_Location :
Amsterdam
Print_ISBN :
978-1-4244-8526-0
Electronic_ISBN :
1071-9032
DOI :
10.1109/ICMTS.2011.5976850