A simple system for on-die measurement of atto-Farad capacitance

Charge Injection Error Free (CIEF) Charge-Base Capacitance Measurement (CBCM) technique provides a simple way for accurate measurements of on-chip interconnect parasitic capacitance. We report here for the first time capacitance measurements of on-chip interconnect with resolution values of 1aF or better. We analyze the setup requirements to allow such capability, and show stable coupling capacitance measurement results at the 1aF resolution.