Title :
A versatile defectivity monitor designed for efficient test and failure analysis
Author :
Lauderdale, Matt ; Smith, Brad
Author_Institution :
Freescale Semicond., Inc., Austin, TX, USA
Abstract :
This paper describes development, design, and test of a short flow defectivity monitor. Careful considerations were given to size the structures and to arrange them in a fashion that allows both efficient test and efficient failure analysis. Test time was saved by using a two-step probe method. A coarse pass was used to test wafers for defects. Then specific defects were localized with additional testing.
Keywords :
failure analysis; integrated circuit design; integrated circuit testing; coarse pass; efficient test analysis; failure analysis; short flow defectivity monitor; structures size; test time; two-step probe method; versatile defectivity monitor; wafer defect test; Layout; Mathematical model; Probes; Resistance; Resistors; Semiconductor diodes; Testing;
Conference_Titel :
Microelectronic Test Structures (ICMTS), 2011 IEEE International Conference on
Conference_Location :
Amsterdam
Print_ISBN :
978-1-4244-8526-0
Electronic_ISBN :
1071-9032
DOI :
10.1109/ICMTS.2011.5976855
