Improved parameter extraction procedures for the R3 model

This paper presents improved extraction algorithms for parameters of the R3 resistor model. For poly resistors we show how the depletion pinching parameters can be computed so that there are no numerical problems. For diffused resistors we provide a data analysis procedure that enables robust estimation of the depletion pinching parameters in the presence both of measurement noise and of velocity saturation or self-heating effects, and show that self-heating can be significantly more important than velocity saturation even for diffused resistors.